JPH0478935U - - Google Patents
Info
- Publication number
- JPH0478935U JPH0478935U JP12155990U JP12155990U JPH0478935U JP H0478935 U JPH0478935 U JP H0478935U JP 12155990 U JP12155990 U JP 12155990U JP 12155990 U JP12155990 U JP 12155990U JP H0478935 U JPH0478935 U JP H0478935U
- Authority
- JP
- Japan
- Prior art keywords
- ozone
- piping
- ozone generator
- generator
- branch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 12
- 238000002347 injection Methods 0.000 claims description 4
- 239000007924 injection Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Oxygen, Ozone, And Oxides In General (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12155990U JPH0478935U (en]) | 1990-11-20 | 1990-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12155990U JPH0478935U (en]) | 1990-11-20 | 1990-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0478935U true JPH0478935U (en]) | 1992-07-09 |
Family
ID=31869410
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12155990U Pending JPH0478935U (en]) | 1990-11-20 | 1990-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0478935U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022526453A (ja) * | 2019-04-16 | 2022-05-24 | 北京北方華創微電子装備有限公司 | 反応ガス供給システムおよびその制御方法 |
-
1990
- 1990-11-20 JP JP12155990U patent/JPH0478935U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022526453A (ja) * | 2019-04-16 | 2022-05-24 | 北京北方華創微電子装備有限公司 | 反応ガス供給システムおよびその制御方法 |
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